Influence of Solution pH Value on the Preparation of SrTiO₃ Thin Films through Self-Assembly of Liquid Precursor Reaction

Abstract:

The experimental makes use of the liquid-phase reaction of self-assembly method, we immerse the functional glass substrates into the precursor solution to prepare SrTiO3 films, which makes (NH4)2TiF6, Sr(NO3)2, H3BO4 as raw materials, then study the growth status of SrTiO3 thin films under different pH values of precursor solution, the morphology and the phase of the films are characterized by OMS, XRD and SEM, it is shown that when the pH value of the precursor solution under 2.0, the SrTiO3 films are unable to grow, when the pH value above 3.0, a white emulsion liquid precursor solution occurred, as a result, SrTiO3 films deposition can’t be achieved. And when the pH value between 2.0 and 3.0(contain both), with the pH value increasing the deposition time of the SrTiO3 films decreases. After annealing treatment at 600°C, we can have a conclusion that under these conditions the phase of the films are pure SrTiO3 films, the surface is smooth and the grains grow uniformly.

• Periodical: Advanced Materials Research (Volumes 105-106)
• Pages: 470-473
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.105-106.470
• Online since: April 2010
• Authors: Lei Cheng, Guo Qiang Tan, Hong Yan Miao, Yan Wang
• Keywords: Liquid Precursor Reaction, Self-Assembly, SrTiO₃ Films

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