Surface Spot Defects Inspection of Multi-Crystalline Silicon Wafers Based on HALCON

Xiao Song Wu; Rui Miao; Yu Dong Si; Cheok Man Lou; Duan Xia Xu; Xue Ning Chu

doi:10.4028/www.scientific.net/AMR.1081.241

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 1081Surface Spot Defects Inspection of...

Surface Spot Defects Inspection of Multi-Crystalline Silicon Wafers Based on HALCON

Abstract:

As a common kind of surface defects on multi-crystalline silicon solar cells (about 65% of total defects). Based on HALCON image processing library, an automatic silicon wafer surface spot defects detection and classification system has been developed: captured color images via CCD image sensor, located wafers and spots, extracted the spot features, computed and separated the qualified regions from the unqualified ones by SVM classifier. The experimental result showed a high accuracy of 95.7% and fast image analyzing and classifying process (less than 600ms).

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Periodical:

Advanced Materials Research (Volume 1081)

Pages:

241-245

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1081.241

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Online since:

December 2014

Authors:

Xiao Song Wu, Rui Miao, Yu Dong Si, Cheok Man Lou, Duan Xia Xu, Xue Ning Chu

Keywords:

Machine Vision, Solar Cells, Surface Spot Defects

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References

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