Analysis of Magnetron-Deposited Titanium Oxynitride Coatings by Scanning Electron Microscopy and Raman Scattering

Galina V. Arysheva; Nina M. Ivanova; Maksim E. Konishchev; Alla A. Pustovalova; Vladimidr S. Sypchenko

doi:10.4028/www.scientific.net/AMR.1084.3

Paper Titles

Preface and Conference Organization

Analysis of Magnetron-Deposited Titanium Oxynitride Coatings by Scanning Electron Microscopy and Raman Scattering
p.3

Behavior of TiO2-B System under Mechanical Activation
p.7

Changes in the Spectral Characteristics of Aluminum Films Deposited under Assisting Argon Ion Beam
p.11

Eddy Current Method for Testing of Metals under Simultaneous Exposure to Radiation and Hydrogenation
p.16

Effect of Hydrogen on Conductivity of Metals
p.21

Formation of Shear Zone's Defect Structure in F.C.C. Metals
p.26

Influence of Carbon Pulse Ion Beam on Titanium Alloy
p.30

Investigation of Multilayered Film Structure Properties for Creation of Hydrogen Selective Membrane
p.34

HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 1084Analysis of Magnetron-Deposited Titanium...

Analysis of Magnetron-Deposited Titanium Oxynitride Coatings by Scanning Electron Microscopy and Raman Scattering

Abstract:

The results of study of surface morphology and chemical composition of biocompatible titanium oxide and oxynitride coatings deposited by the method of reactive magnetron sputtering are presented in this paper. The distribution of coating’s fragments in size was obtained. Molecular composition of the coatings was obtained by scanning electron microscopy and Raman scattering.

You might also be interested in these eBooks

Radiation and Nuclear Techniques in Material Science

View Preview

Info:

Periodical:

Advanced Materials Research (Volume 1084)

Pages:

3-6

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1084.3

Citation:

Cite this paper

Online since:

January 2015

Authors:

Galina V. Arysheva, Nina M. Ivanova, Maksim E. Konishchev, Alla A. Pustovalova, Vladimidr S. Sypchenko

Keywords:

Biocompatible Coatings, Grain Size, Magnetron Sputtering, Morphology, Raman Scattering, Titanium Oxide, Titanium Oxynitride

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] G. Mani, M.D. Feldman, D. Patel, C.M. Agrawal, Coronary stents: A materials perspective, J. Biomaterials. 28 (2007) 1689-1710.

DOI: 10.1016/j.biomaterials.2006.11.042

Google Scholar

[2] J-M. Chappé, M. Nicolas, Gradual Evolution of the Properties in Titanium Oxynitride Thin Films, Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods, Bentham E-books. (2013) 113-132.

DOI: 10.2174/9781608051564113010009

Google Scholar

[3] E.N. Kudryavtseva, V.F. Pichugin, N.N. Nikitenkov et al, Study of Coatings Based on Titanium Oxides and Oxynitrides Using a Set of Methods, J. Surface. X-ray, Synchrotron and Neutron Techniques. 8 (2012) 1-52.

DOI: 10.1134/s1027451012080113

Google Scholar

[4] A.V. White, G.D. Karpenko, N.K. Myshkin, Structure and methods of forming wear-resistant surface layers, Engineering, Moscow, (1991).

Google Scholar

[6] W. Hu, L. Li, G. Li, et. al., High-Quality Brookite TiO2 Flowers: Synthesis, Characterization, and Dielectric Performance, Crystal Growth & Design. 9 (2009) 3676-3682.

DOI: 10.1021/cg9004032

Google Scholar