Structural Phase State and Mechanical Properties of the Si-Al-N Coatings with Different Concentration Ratio of Al and Si

Viktor Sergeev; Marina V. Fedorischeva; Mark P. Kalashnikov; Irina A. Bozhko; Andrey V. Voronov; Evgeniya V. Ribalko; Yurii P. Mironov

doi:10.4028/www.scientific.net/AMR.1085.289

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 1085Structural Phase State and Mechanical Properties...

Structural Phase State and Mechanical Properties of the Si-Al-N Coatings with Different Concentration Ratio of Al and Si

Abstract:

The amorphous and nanocomposite coatings on the basis of Si-Al-N with different ratios of Al and Si concentrations were prepared by reactive magnetron sputtering method. Structural-phase state of coatings on the basis of Si-Al-N was investigated by TEM, SEM and X-ray analysis. Microhardness, modulus of elasticity, elastic recovery coefficient was determined by nanoindentation method.

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Periodical:

Advanced Materials Research (Volume 1085)

Pages:

289-293

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1085.289

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Online since:

February 2015

Authors:

Viktor Sergeev, Marina V. Fedorischeva, Mark P. Kalashnikov, Irina A. Bozhko, Andrey V. Voronov, Evgeniya V. Ribalko, Yurii P. Mironov

Keywords:

Aluminum Silicon Nitrides, Heat-Shielding Ceramic Coatings, Magnetron Deposition, Microstructure, Nanocomposite Coatings, Phase Composition

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References

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