Angular Distribution of XPS Peaks by Layers of a Finite Thickness

Abstract:

On the basis of the invariant imbedding method the equations describing energy spectra of X-ray photoelectron emission by layers of a finite thickness are presented. The analytical decisions describing angular distributions of electrons emitted by layer were received in small-angle approximation and neglect the backscattering factor. Approbation of the received decisions is executed on the basis of comparison with results of Monte-Carlo simulation. The limitations of the theory neglecting with processes of an electron elastic scattering are shown.

• Periodical: Advanced Materials Research (Volume 1085)
• Pages: 496-501
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.1085.496
• Online since: February 2015
• Authors: Viktor Afanas'ev, Alexander Gryazev*
• Keywords: Angular Distribution, Elastic Scattering, Finite Thickness Layer, Invariant Imbedding, Small-Angle Approximation, XPS

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