The Vacancy Generation Influence on the Initial Stage of Ion Implantation

E.S. Parfenova; Anna G. Knyazeva

doi:10.4028/www.scientific.net/AMR.1097.29

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 1097The Vacancy Generation Influence on the Initial...

The Vacancy Generation Influence on the Initial Stage of Ion Implantation

Abstract:

The coupled model is presented to describe the elements penetration into the surface layer of metal during the process of ion implantation. Mechanical stresses arising due to the interaction of particles with the surface affect the redistribution of the implanted impurity. In addition, the existence of vacancies in the metal surface and their generation under the stresses influence are taken into account. The kinetic law is written on the basis of the thermodynamics of irreversible processes. The solution had been found numerically. As a result, the distributions of impurity concentration and deformations have been obtained for various time moments. The comparison of the concentration profiles with vacancies and without their have been given.

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Periodical:

Advanced Materials Research (Volume 1097)

Pages:

29-34

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1097.29

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Online since:

April 2015

Authors:

E.S. Parfenova*, Anna G. Knyazeva

Keywords:

Concentration Wave, Coupling Model, Diffusion, Elastic Wave, Numerical Solution, Surface Treatment

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