TiO2 Nanoparticles Thin Film Prepared by Electrostatic Spray Deposition Technique for Humidity-Sensing Device

Direklit Chantarawong; Korakot Onlaor; Thutiyaporn Thiwawong; Benchapol Tunhoo

doi:10.4028/www.scientific.net/AMR.1131.153

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 1131TiO2 Nanoparticles Thin Film Prepared by...

TiO₂ Nanoparticles Thin Film Prepared by Electrostatic Spray Deposition Technique for Humidity-Sensing Device

Abstract:

Titanium dioxide (TiO₂) nanoparticles thin films were prepared by electrostatic spray deposition technique. The effect of the deposition times on properties of TiO₂films was investigated. The characteristics of TiO₂ thin films were performed by X-ray diffraction, and Raman spectroscopy. In addition, the TiO₂ nanoparticles thin film was deposited onto the interdigited electrodes to fabricate the humidity sensor device. The humidity adsorption and desorption properties of the sensor were studies. The sensing mechanism of the humidity device can be explained by complex impedance analysis.

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Periodical:

Advanced Materials Research (Volume 1131)

Pages:

153-156

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1131.153

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Online since:

December 2015

Authors:

Direklit Chantarawong*, Korakot Onlaor, Thutiyaporn Thiwawong, Benchapol Tunhoo

Keywords:

Electrostatic Spray Deposition, Thin Film, Titanium Dioxide Nanoparticles

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