A Study on the Ductile Mode Cutting of Lithium Niobate

Abstract:

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This paper describes the cutting characteristics of lithium niobate, which is used for surface acoustic wave type micropumps, regarding the formation of micro grooves by direct cutting. Since lithium niobate is a brittle material with a strong crystal orientation dependency, significant differences were observed in the characteristics of the finished surface according to different directions of cutting. The ductile mode cutting of lithium niobate was found to be feasible with cutting depths of approx. 5 μm or less. Also, results of the study show the feasibility of the formation of minute grooves through the cutting of lithium niobate, using milling with an end mill.

Info:

Periodical:

Advanced Materials Research (Volumes 126-128)

Edited by:

Yunn-Shiuan Liao, Chao-Chang A. Chen, Choung-Lii Chao and Pei-Lum Tso

Pages:

246-251

DOI:

10.4028/www.scientific.net/AMR.126-128.246

Citation:

H. Shizuka et al., "A Study on the Ductile Mode Cutting of Lithium Niobate", Advanced Materials Research, Vols. 126-128, pp. 246-251, 2010

Online since:

August 2010

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Price:

$35.00

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