A Study on the Ductile Mode Cutting of Lithium Niobate

Hiroo Shizuka; Koichi Okuda; Masayuki Nunobiki; Wei Li; Takanobu Inaoka

doi:10.4028/www.scientific.net/AMR.126-128.246

Paper Titles

Comparative Studies on the Cutting Performance of HFCVD Diamond and DLC Coated WC-Co Milling Tools in Dry Machining Al/SiC-MMC
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Study on the Cutting Performance of HFCVD Diamond Coated Silicon Nitride Inserts in Dry Turning Aluminum Silicon Alloy
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Elastic and Plastic Behaviors in Ductile-Regime Machining Process of Quartz Glass
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DEM Simulation and Experimental Investigation of Silicon Carbide on Pre-Stressed Machining
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A Study on the Ductile Mode Cutting of Lithium Niobate
p.246

A Study of Ultrasonically Assisted Fly Cutting for High Precision Machining Hard Brittle Materials
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The Investigation on Small Hole Drilling-Grinding in Glass and Ceramic
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Machining Schemes for Dicing Soda Lime Glass
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Effect of Shear and Thermal Characteristics on Chemical Mechanical Polishing
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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 126-128A Study on the Ductile Mode Cutting of Lithium...

A Study on the Ductile Mode Cutting of Lithium Niobate

Abstract:

This paper describes the cutting characteristics of lithium niobate, which is used for surface acoustic wave type micropumps, regarding the formation of micro grooves by direct cutting. Since lithium niobate is a brittle material with a strong crystal orientation dependency, significant differences were observed in the characteristics of the finished surface according to different directions of cutting. The ductile mode cutting of lithium niobate was found to be feasible with cutting depths of approx. 5 μm or less. Also, results of the study show the feasibility of the formation of minute grooves through the cutting of lithium niobate, using milling with an end mill.

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Periodical:

Advanced Materials Research (Volumes 126-128)

Pages:

246-251

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.126-128.246

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Online since:

August 2010

Authors:

Hiroo Shizuka, Koichi Okuda, Masayuki Nunobiki, Wei Li, Takanobu Inaoka

Keywords:

Diamond Cutting, Ductile Mode, Lithium Niobate, Surface Acoustic Wave (SAW)

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References

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