Effect of Material Type and Tip Radius of AFM Probes on Nanosheets Groove Machining Accuracy

Abstract:

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This paper presents results of groove machining of potassium niobate nanosheets using an atomic force microscope (AFM). Groove machining operations are performed using recently developed diamond coating (DC) and super sharp silicon (sss) probes. The results obtained using these probes are compared to results obtained using a conventional silicon (Si) probe in order to examine the effects of the material type and the tip radius of the AFM probe on groove machining accuracy.

Info:

Periodical:

Advanced Materials Research (Volumes 126-128)

Edited by:

Yunn-Shiuan Liao, Chao-Chang A. Chen, Choung-Lii Chao and Pei-Lum Tso

Pages:

835-842

DOI:

10.4028/www.scientific.net/AMR.126-128.835

Citation:

K. Demura et al., "Effect of Material Type and Tip Radius of AFM Probes on Nanosheets Groove Machining Accuracy", Advanced Materials Research, Vols. 126-128, pp. 835-842, 2010

Online since:

August 2010

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Price:

$35.00

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