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Study on Planar Motion Table System for Nano-Machining Based on Aerostatic
Abstract:
Removed due to plagiarism. The original was published as: H. Shinno, H. Yoshioka, K. Taniguchi, A Newly Developed Linear Motor-Driven Aerostatic X-Y Planar Motion Table System for Nano-Machining, CIRP Annals - Manufacturing Technology, V.56, 1, 2007, Pages 369–372 http://www.sciencedirect.com/science/article/pii/S000785060700090X doi:10.1016/j.cirp.2007.05.086
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109-112
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August 2010
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© 2010 Trans Tech Publications Ltd. All Rights Reserved
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