Study on Planar Motion Table System for Nano-Machining Based on Aerostatic

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Abstract:

Removed due to plagiarism. The original was published as: H. Shinno, H. Yoshioka, K. Taniguchi, A Newly Developed Linear Motor-Driven Aerostatic X-Y Planar Motion Table System for Nano-Machining, CIRP Annals - Manufacturing Technology, V.56, 1, 2007, Pages 369–372 http://www.sciencedirect.com/science/article/pii/S000785060700090X doi:10.1016/j.cirp.2007.05.086

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Periodical:

Advanced Materials Research (Volumes 129-131)

Pages:

109-112

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Online since:

August 2010

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© 2010 Trans Tech Publications Ltd. All Rights Reserved

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