Study on Planar Motion Table System for Nano-Machining Based on Aerostatic

Abstract:

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Removed due to plagiarism. The original was published as: H. Shinno, H. Yoshioka, K. Taniguchi, A Newly Developed Linear Motor-Driven Aerostatic X-Y Planar Motion Table System for Nano-Machining, CIRP Annals - Manufacturing Technology, V.56, 1, 2007, Pages 369–372 http://www.sciencedirect.com/science/article/pii/S000785060700090X doi:10.1016/j.cirp.2007.05.086

Info:

Periodical:

Advanced Materials Research (Volumes 129-131)

Edited by:

Xie Yi and Li Mi

Pages:

109-112

DOI:

10.4028/www.scientific.net/AMR.129-131.109

Online since:

August 2010

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$35.00

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