Fabrication of Micro Aspheric Mould Integrated Ultra-Precision Grinding and Magnetorheological Finishing
This paper deals with one-point parallel grinding and magnetorheological finishing (MRF) polishing of micro glass lens mould. Firstly,the analysis and experiment of one-point parallel grinding are conducted on micro-aspheric mould with 10mm in diameter , after grinding ,the results show that the form accuracy of the micro aspheric mould are 2.538 μm in PVand 0.645 μm in RMS, also the subsurface damages and residual grinding marks are left ;And then , the magnetorheological finishing experiment is counducted, the form accuracy achieves 0.892 μm in PV and 0.287 μm in RMS ,after finishing, the surface quality was improved.
Qiusheng Yan, Jiabin Lu, Jun Wang and Hang Gao
S. H. Yin et al., "Fabrication of Micro Aspheric Mould Integrated Ultra-Precision Grinding and Magnetorheological Finishing", Advanced Materials Research, Vol. 135, pp. 134-138, 2010