In order to resolve the problem of polishing micro-shafts and cavities, a novel technique of Micro-Electrochemical Polishing Mixed with Powder (EPMP) has been presented in this paper. That can be accomplished through high speed spindle driving micro-abrasive to proceed soft-grinding, which can achieve merit of little polishing force. The principle of EPMP has been introduced, and a series of issues have been studied. Finally, experiments of EPMP have been carried out based on above optimized machining parameters, and a micro-screw-shaft of Φ100μm has been polished. Which is near to mirror effect (Ra=0.02μm).