Effect of Material Properties on Aspheric Surfaces Polishing by Compliant Hybrid Position/Force Controlling

Jian Ming Zhan; Si Hai Yu

doi:10.4028/www.scientific.net/AMR.135.69

Paper Titles

Research on the Constraint Mechanism of Abrasive Particle of MR Effect-Based Tiny-Grinding Wheel
p.46

Study on the Influence of Geometrical Parameters of Abrasive Grains in Abrasive Flow Machining
p.52

Polishing of Small Workpiece with Complicated Surfaces by Electro-Magnetic Grinding Method
p.58

A Study on the Surface Microstructural Integrity of Ceramics Milled with Abrasive Waterjet
p.64

Effect of Material Properties on Aspheric Surfaces Polishing by Compliant Hybrid Position/Force Controlling
p.69

Temperature Distribution of IFA Polishing Single Silicon Wafer
p.73

Analysis of Ultrasonic Honing Chatter Vibration Trajectory
p.79

The Contact Pressure Distribution and its Effects on the Magnetic Disc Substrate Surface Profiles in Chemical Mechanical Polishing
p.84

Study on Friction Force Distribution on Silicon Wafer Surface in CMP Process
p.90

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Effect of Material Properties on Aspheric Surfaces Polishing by Compliant Hybrid Position/Force Controlling

Abstract:

Generally, aspheric surfaces require extra high accuracy and roughness and need to be polished further after being shaped. Because the interaction between tool and work-piece in polishing process is compliant, rather than the kind of rigid cutting, the machining quality and machining process are closely allied to the physical properties of the work-piece material. A new three-degree-of-freedom hybrid position/force servo polishing system, which is based on universal CNC Lathe, is developed, and the effect of work-piece materials on the polishing process and processing quality of aspheric surfaces is studied after aspheric parts are compliantly polished in accordance with the Preston removal regulation in this paper.