Dynamic Characteristic Analysis and Machining Error Study Based on Solid Vibration Beam Rate Sensor

Abstract:

Machining error of vibration beam rate sensor and its influencing to the performance of solid vibration inertial sensor were studied. The dynamics model was analyzed, and the mechanism error caused by the technology limit was studied and the theory of deducing the error was presented. Numerical calculations combined with 100mm alloyed vibration beam have been made. Results showed that quadrature error is the primary factor of affecting gyro’s performance; the error caused by mass center deviation of vibration beam change with angular acceleration, which can be ignored under the condition that small angular acceleration. The affects of parasitic Coriolis error on performance is minimal, which can be neglected. Finally, the quadrature error’s simulation results were consistent with expected results. The result also proved that restraining and compensating quadrature errors is one of the key technology to increase the performance.

• Periodical: Advanced Materials Research (Volumes 148-149)
• Pages: 529-534
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.148-149.529
• Online since: October 2010
• Authors: Yu Liu, Yong Le Lu, Liao Liao Zeng, Xiao Peng Du, Lei Lei Li, Ying Jun Pan
• Keywords: Dynamic Equation, Quadrature Error, Vibration Beam Rate Sensor

References

[1] Bumkyoo Choi , Seung-Yop Lee, Taekhyun Kim, et al. Dynamic Characteristics of Vertically Coupled Structures and the Design of a Decoupled Micro Gyroscope[J]. Sensors, 2008, 8: 3706-3718.

DOI: 10.3390/s8063706

[2] Vikrant Bhadbhade, Nader Jalili, S. Nima Mahmoodi. A novel piezoelectrically actuated flexural /torsional vibrating beam gyroscope[J]. Journal of Sound and Vibration, 2008, 311: 1305–1324.

DOI: 10.1016/j.jsv.2007.10.017

[3] ZHANG Fuxue. Piezoelectric Crystal Anglar Rate Sensor[M]. Beijing: National Defense Industry Press, 1981: 17-19 (in Chinese).

[4] Wang Shujuan; Wu Guangyu. A Summary of the Methods for Compensating Temperature Error of Inertial Devices[J]. Journal of Chinese Inertial Technology，1998, 6(3): 44-49．(in Chinese).

[5] Yang Bo, Zhou Bailing, Wang Shourong. Quadrature error and bias error suppression circuitry for silicon micro-gyroscope[J]. Journal of Southeast University (English Edition), 2008, 24(4): 487-491.

DOI: 10.1109/nems.2008.4484364

[6] LV Zhi-qing, CHEN Chao-chun, YUAN Xi-bin. Designing Method of Closed Loop Control System of Vibratory Gyro[J]. PIEZOELECTRICS & ACOUSTOOPTICS, 2009, 31(1): 15-17.

[7] SHI Qin, QIU An-ping, SU Yan, et al. Mechanical coupling error of silicon microgyroscope[J]. OPTICS AND PRECISION ENGINEERING, 2008, 16(5): 894-898 (in Chinese).

[8] XIE Liqiang，WU Xuezhong，LI Shengyi. The Study of Mechanical Coupling in Quartz Micromachined Gyroscope System[J]. JOURNAL OF NATIONAL UNWEESITY OF DEFENSE TECHNOLOGY. 2007, 29(1): 131-13(in Chinese).