Enchancement of Mechanical Properties in BaTiO₃ Ferroelectric Thin Films

Abstract:

Surface structure and mechanical properties of BaTiO3 thin films prepared by sol-gel process were investigated by XP-2 profiler and nano-indention. The results indicated that the thickness of thin films got thicker with sintering temperature and the thickness-increasing rate differ from different solvent. The hardness and elastic modulus were enhanced due to the presence of residual stress which was compression and probably induced by fabrication method. The maximum hardness is 9.98GPa when the Young’s modulus is 127.41GPa with ethanol as solvent sintered at 1000oC.

• Periodical: Advanced Materials Research (Volumes 150-151)
• Pages: 599-602
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.150-151.599
• Online since: October 2010
• Authors: Cheng Lu, Xiang Yun Deng, Xiao Fen Guan, Zhong Wen Tan, Yan Jie Zhang, Ren Bo Yang, Li Ren Han
• Keywords: BaTiO₃ Thin Film, Mechanical Property, Sol-Gel Process

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