Study on Microstructure Characterization of Al-N Codoping ZnO Films and Doping Mechanism
Al-N codoped ZnO thin films were prepared by sol-gel method, which microstructure were characterized by AFM and XPS, on the basis of the result, doping mechanism of Al-N co-doped thin film is: the formation of the first occurrence of Al was replacing doping system of Zn, and it is conducive for N element in the system to the solution along with the increasing of Al doping concentration.
Zhengyi Jiang, Jingtao Han and Xianghua Liu
Y. Xu et al., "Study on Microstructure Characterization of Al-N Codoping ZnO Films and Doping Mechanism", Advanced Materials Research, Vols. 152-153, pp. 813-816, 2011