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Study on Microstructure Characterization of Al-N Codoping ZnO Films and Doping Mechanism

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Abstract:

Al-N codoped ZnO thin films were prepared by sol-gel method, which microstructure were characterized by AFM and XPS, on the basis of the result, doping mechanism of Al-N co-doped thin film is: the formation of the first occurrence of Al was replacing doping system of Zn, and it is conducive for N element in the system to the solution along with the increasing of Al doping concentration.

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Periodical:

Advanced Materials Research (Volumes 152-153)

Pages:

813-816

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.152-153.813

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Online since:

October 2010

Authors:

Ying Xu, Wang Juan, Yu Bo Dou

Keywords:

Atomic Force Microscope (AFM), Co-Doping, Doping Mechanism, Microstructure, XPS

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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References

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