SEM Analysis of Non-Conducting Materials under Low Vacuum Conditions

Abstract:

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The surface morphology of the non-conducting granular materials was analysis by SEM under low vacuum conditions. The effects of the incident electron voltage, electronic beam spot size and atmosphere pressure on the SEM image quality and EDX analysis were investigated systematically. The results show that the quality and the resolution of the SEM images both reduce with the increase of the incident electron voltage, the electronic beam spot size and the atmosphere pressure; the errors of the EDS analysis decrease when measured under low vacuum conditions.

Info:

Periodical:

Advanced Materials Research (Volumes 152-153)

Edited by:

Zhengyi Jiang, Jingtao Han and Xianghua Liu

Pages:

897-901

DOI:

10.4028/www.scientific.net/AMR.152-153.897

Citation:

Z. G. Wang et al., "SEM Analysis of Non-Conducting Materials under Low Vacuum Conditions", Advanced Materials Research, Vols. 152-153, pp. 897-901, 2011

Online since:

October 2010

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Price:

$35.00

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