SEM Analysis of Non-Conducting Materials under Low Vacuum Conditions
The surface morphology of the non-conducting granular materials was analysis by SEM under low vacuum conditions. The effects of the incident electron voltage, electronic beam spot size and atmosphere pressure on the SEM image quality and EDX analysis were investigated systematically. The results show that the quality and the resolution of the SEM images both reduce with the increase of the incident electron voltage, the electronic beam spot size and the atmosphere pressure; the errors of the EDS analysis decrease when measured under low vacuum conditions.
Zhengyi Jiang, Jingtao Han and Xianghua Liu
Z. G. Wang et al., "SEM Analysis of Non-Conducting Materials under Low Vacuum Conditions", Advanced Materials Research, Vols. 152-153, pp. 897-901, 2011