A Novel In Situ Roughness Measurement Based on Spatial Average Analysis of Binary Speckle Image
This study proposes a novel optical technique and method for in-situ roughness measurement. The speckle image was obtained by illuminating a laser beam and the reflected laser pattern image from a surface was binarizd and examined. The intensity distribution of binary image utilizes the combined effects of speckle and scattering phenomena. A new parameter of intensity distribution of binary image, Sd BD has been proposed and the surface roughness parameter Ra of machined surfaces (ground) were correlated experimentally. Measurement results demonstrate an excellent correlation between the SdBD and Ra with correlation coefficient of 0.9706. The practicality of the proposed method to in-situ roughness measurement was applied to six samples from roughness Ra 0.2 to 6.25μm (0.3 λ and 10 λ, where λ is diode laser wavelength) of steel through grinding process.
Zhengyi Jiang, Xianghua Liu and Jinglong Bu
K. C. Hsu and Y. K. Fuh, "A Novel In Situ Roughness Measurement Based on Spatial Average Analysis of Binary Speckle Image", Advanced Materials Research, Vols. 154-155, pp. 1125-1130, 2011