Study on Bombardment Energy of Substrate Surface in Sputtering Environment by Langmuir Probe
Based on deposition rate of coatings and ion flux measured by Langmuir probe in sputtering environment, bombardment energy Ec1 of sputtered neutral atoms and bombardment energy Ec2 of bombardment ions accepted by substrate surface micro-area per unit time were calculated. The magnitude of Ec1 and Ec2 was approximately the same, surface diffusing processes of the top layer atoms in the coating were accelerated by the simultaneity action of Ec1 and Ec2, bulk diffusion processes of the atoms under the top layer in the coating were promoted by energy accumulation and temperature rise effect caused by the continuance action of Ec1 and Ec2.
Guojun Zhang and Jessica Xu
H. T. Li et al., "Study on Bombardment Energy of Substrate Surface in Sputtering Environment by Langmuir Probe", Advanced Materials Research, Vols. 160-162, pp. 1839-1844, 2011