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Structure and Composition Study of InSb Films Prepared by Radio-Frequency Sputtering

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Abstract:

We present a systematic study of the effect of the sputtering parameters on the structure and composition of InSb film. The effect of the sputtering parameters on the crystallographic structure of InSb films is discussed in terms of the kinetic energy of the particle bombarding the growing film. Measurements of the chemical composition show that In to Sb concentration ratio increases with the increase of working pressure because Sb atoms are more rapidly thermalized by collisions with argon atoms during the transport process of the sputtered atoms. And the composition of the films is governed by the Sb re-evaporation process at the surface of the growing films. In to Sb concentration ratio is enhanced by increasing the substrate temperature (essentially) or RF power.

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Periodical:

Advanced Materials Research (Volumes 160-162)

Pages:

886-890

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.160-162.886

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Online since:

November 2010

Authors:

Yan Ping Yao, Chun Ling Liu, Hai Dong Qi, Xi Chang, Chun Wu Wang

Keywords:

Composition, InSb, Structure, Thin Film

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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References

[1] C.M.H. Driscoll, J.R. Barthe, M. Oberhofer, G. Busuoli and C. Hickman: Radiation Protection Vol. 14 (1986), p.17.

DOI: 10.1093/oxfordjournals.rpd.a079618

Google Scholar

[2] N. J. Shevchik: Phys. Rev. Lett. Vol. 31 (1973), p.1245.

Google Scholar

[3] A. K. Sharma and P. Jayarama Reddy: Journal of Non-Crystalline Solids Vol. 41 (1980), p.13.

Google Scholar

[4] G. Burrafato, N.A. Mancini, S. Santagati, S.O. Troja, A. Torrisid, and O. Puglisi: Thin Solid Films Vol. 30 (1984) , p.291.

DOI: 10.1016/0040-6090(84)90057-9

Google Scholar

[5] J. L. Seguin, B. El. Hadadi, H. Carchano and K. Aguir:J. Non-Crystalline Solids. Vol. 183 (1995), p.175.

DOI: 10.1016/0022-3093(94)00564-8

Google Scholar

[6] J. S. Blakemore: J. Appl. Phys. Vol. 53(1982), p.123.

Google Scholar

[7] Y. L. He, G. H. Chen and F. Q. Zhang: Amorphous Semiconductor Physics (High Education Press, Beijing 1980).

Google Scholar

[8] J. L. Seguin, B. El. Hadadi, H. Carchano and K. Aguir: J. Non-Crystalline Solids. Vol. 238 (1998) p.253.

DOI: 10.1016/s0022-3093(98)00689-9

Google Scholar

[9] A. Gras-Marti, and J. C. Moreno-Martin: Plasmas-Surface interactions and Processing of Materials, NATO ASI Series, 1990, p.135.

Google Scholar

[10] A. Gras-Marti: J. Appl. Phys. Vol. 54(1983) , p.1071.

Google Scholar

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