Simulation for Aberration of Chromium Atomic Beam Focusing and Deposition
The image distortion which comes from aberration is analyzed and the effects on focal line features are also discussed, which are resulted from the spherical aberration, chromatic aberration and beam spread. The simulation results have show that source imperfection, especially the transverse velocity spread, plays a critical role in broadening the feature width.
Zhengyi Jiang, Shanqing Li, Jianmin Zeng, Xiaoping Liao and Daoguo Yang
W. T. Zhang et al., "Simulation for Aberration of Chromium Atomic Beam Focusing and Deposition", Advanced Materials Research, Vols. 189-193, pp. 4191-4194, 2011