Simulation for Aberration of Chromium Atomic Beam Focusing and Deposition

Abstract:

Article Preview

The image distortion which comes from aberration is analyzed and the effects on focal line features are also discussed, which are resulted from the spherical aberration, chromatic aberration and beam spread. The simulation results have show that source imperfection, especially the transverse velocity spread, plays a critical role in broadening the feature width.

Info:

Periodical:

Advanced Materials Research (Volumes 189-193)

Edited by:

Zhengyi Jiang, Shanqing Li, Jianmin Zeng, Xiaoping Liao and Daoguo Yang

Pages:

4191-4194

DOI:

10.4028/www.scientific.net/AMR.189-193.4191

Citation:

W. T. Zhang et al., "Simulation for Aberration of Chromium Atomic Beam Focusing and Deposition", Advanced Materials Research, Vols. 189-193, pp. 4191-4194, 2011

Online since:

February 2011

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Price:

$35.00

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