Coupled Electro-Thermal-Mechanical Micro-Hotplate-Based for Micro Gas Pressure Sensor

Ren Cheng Jin; Ming Liang Shao; Li Sha Meng; Zhe Nan Tang; Jia Qi Wang

doi:10.4028/www.scientific.net/AMR.204-210.1086

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 204-210Coupled Electro-Thermal-Mechanical...

Coupled Electro-Thermal-Mechanical Micro-Hotplate-Based for Micro Gas Pressure Sensor

Abstract:

In this paper, electro-thermal-mechanical theoretical analysis of micro-hotplate-based micro gas pressure sensor is carried out, which is on basis of the classical heat transfer theory and rarefied gas dynamics. Combined with micro-hotplate (MHP) theory analysis of heat transfer and thermal-mechanical finite element modeling, electro-thermal-mechanical coupled analysis of theoretical models with regard to the MHP-based micro gas pressure sensor is built. Then, through the ANSYS-one of the finite element analysis software-the simulation analysis of MHP went well. The simulation results show that MHP generates a smaller deformation because of adding the thermal conductivity, and MHP provides a more feasible analysis method in the theoretical study of micro hotplate.

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Periodical:

Advanced Materials Research (Volumes 204-210)

Pages:

1086-1089

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.204-210.1086

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Online since:

February 2011

Authors:

Ren Cheng Jin, Ming Liang Shao, Li Sha Meng, Zhe Nan Tang, Jia Qi Wang

Keywords:

Coupling Analysis, Electro-Thermal-Mechanical Coupled, Micro Hot Plate, Micro Pressure Sensor

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References

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