Coupled Electro-Thermal-Mechanical Micro-Hotplate-Based for Micro Gas Pressure Sensor
In this paper, electro-thermal-mechanical theoretical analysis of micro-hotplate-based micro gas pressure sensor is carried out, which is on basis of the classical heat transfer theory and rarefied gas dynamics. Combined with micro-hotplate (MHP) theory analysis of heat transfer and thermal-mechanical finite element modeling, electro-thermal-mechanical coupled analysis of theoretical models with regard to the MHP-based micro gas pressure sensor is built. Then, through the ANSYS-one of the finite element analysis software-the simulation analysis of MHP went well. The simulation results show that MHP generates a smaller deformation because of adding the thermal conductivity, and MHP provides a more feasible analysis method in the theoretical study of micro hotplate.
Helen Zhang, Gang Shen and David Jin
R. C. Jin et al., "Coupled Electro-Thermal-Mechanical Micro-Hotplate-Based for Micro Gas Pressure Sensor", Advanced Materials Research, Vols. 204-210, pp. 1086-1089, 2011