Coupled Electro-Thermal-Mechanical Micro-Hotplate-Based for Micro Gas Pressure Sensor

Abstract:

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In this paper, electro-thermal-mechanical theoretical analysis of micro-hotplate-based micro gas pressure sensor is carried out, which is on basis of the classical heat transfer theory and rarefied gas dynamics. Combined with micro-hotplate (MHP) theory analysis of heat transfer and thermal-mechanical finite element modeling, electro-thermal-mechanical coupled analysis of theoretical models with regard to the MHP-based micro gas pressure sensor is built. Then, through the ANSYS-one of the finite element analysis software-the simulation analysis of MHP went well. The simulation results show that MHP generates a smaller deformation because of adding the thermal conductivity, and MHP provides a more feasible analysis method in the theoretical study of micro hotplate.

Info:

Periodical:

Advanced Materials Research (Volumes 204-210)

Edited by:

Helen Zhang, Gang Shen and David Jin

Pages:

1086-1089

DOI:

10.4028/www.scientific.net/AMR.204-210.1086

Citation:

R. C. Jin et al., "Coupled Electro-Thermal-Mechanical Micro-Hotplate-Based for Micro Gas Pressure Sensor", Advanced Materials Research, Vols. 204-210, pp. 1086-1089, 2011

Online since:

February 2011

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Price:

$35.00

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