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Fabrication and Characterization of Bonded NdFeB Microstructures for Microelectromechanical Systems Applications

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Abstract:

A micromachining technique has been developed for the fabrication of microscale polymer-bonded magnet. Two types of lithographically defined molds, photoresist mold and electroplated metal mold, were introduced. Photoresist mold is convenient, while electroplated metal mold can be fabricated on the glass or steel substrate which can bear much more compression. NdFeB films of thickness between 50 and 500 µm were prepared by micro-patterning of composites containing 83-95wt% of commercial NdFeB powder after curing at the room temperature. Magnetic properties mainly depend on the types and percentage of volume loading of magnetic powder. Coercivity of 772.4kA/m (9.70kOe), remanence of 275.1mT (2.751kG), and energy product of 22.6kJ/m3 (2.8MGOe) have been achieved. This easily developed magnet could be a promising candidate for applications in magnetic microelectromechanical systems (MEMS).

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Periodical:

Advanced Materials Research (Volumes 211-212)

Pages:

561-564

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.211-212.561

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Online since:

February 2011

Authors:

Kai Tao, Gui Fu Ding, Zhuo Qing Yang, Yan Wang, Pei Hong Wang

Keywords:

Integration, Magnetic Powder, Permanent Micromagnet, Surface Micromachining

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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