Design of a Topology Nano-Positioning Stage

Tao Chen; Li Guo Chen; Ming Qiang Pan; Li Ning Sun

doi:10.4028/www.scientific.net/AMR.211-212.891

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 211-212Design of a Topology Nano-Positioning Stage

Design of a Topology Nano-Positioning Stage

Abstract:

Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro-technology equipment and manufacture. This paper presents a one-dimensional positioning system, adopting a PZT piezoelectric ceramic nano-positioning stage designed by multi-objective topological optimal synthesis. In order to obtain better performance, wedge-shaped structure has been applied as a precise pretension for the piezoelectric ceramic. Through finite element simulation and experimental verification, better static performance and smaller kinetic coupling are achieved, with up to 10 μm stroke displacement output and 5 nm resolution. This stage provides a novel, flexible, and efficient way in the design and optimization of the nano-positioning system.

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Periodical:

Advanced Materials Research (Volumes 211-212)

Pages:

891-894

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.211-212.891

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Online since:

February 2011

Authors:

Tao Chen, Li Guo Chen, Ming Qiang Pan, Li Ning Sun

Keywords:

Micro-Drive, Nano-Positioning Stage, Piezoelectric Ceramic (PZT), Topology Design

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References

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