Study on the Adhesion of Films on Gd by Magnetron Sputtering

Xiao Qiu Zheng; Shi-Kun Xie; Rong Xi Yi

doi:10.4028/www.scientific.net/AMR.214.316

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 214Study on the Adhesion of Films on Gd by Magnetron...

Study on the Adhesion of Films on Gd by Magnetron Sputtering

Abstract:

In order to research the adhesion of sputtering protective coating of Gd. Gd substrates were differently coated with 1Cr18Ni9Ti, Ti, Cu and Al by means of DC magnetron sputtering technology. The characteristics of the films were investigated by scanning electron microscopy (SEM), EDS, and the adhesions of films were tested by tension test. The results show that the films of 1Cr18Ni9Ti, Ti and Al are smooth and perfect, the interferences between 1Cr18Ni9Ti, Ti, Al and Gd join together strongly, and the average strength of adhesion is 25MPa in these tests on the optimize parameters. While the films of Cu are rough and bad, the interferences between Cu and Gd join together loosely, and the largest strength of adhesion is only 3.02MPa in these tests on the optimize parameters.

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Periodical:

Advanced Materials Research (Volume 214)

Pages:

316-319

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.214.316

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Online since:

February 2011

Authors:

Xiao Qiu Zheng, Shi-Kun Xie, Rong Xi Yi

Keywords:

Adhesion, Film Morphology, Interference, Magnetron Sputtering, Refrigerant material

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