Effect of Pressures on the Chemical Vapor Deposition of BN Using Borazine

Abstract:

Boron nitride coatings have been prepared by chemical vapor deposition using borazine as single precursor at 900 °C. The effect of the total pressure on the surface morphologies of the coatings was investigated. For low total pressures (≤ 3 kPa), the deposits presents a compact pebble-like surface structure. However, when high total pressures (> 3 kPa) were used, the surface of the coatings presents a loose grain-like feature. When the total pressure increases up to 12 kPa, the coatings shows a porous surface structure. The composition and structure of the deposited coatings were investigated by means of FTIR and XRD analysis. It shows that the coatings have a structure of turbostratic boron nitride.

• Periodical: Advanced Materials Research (Volume 214)
• Pages: 588-592
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.214.588
• Online since: February 2011
• Authors: Jun Sheng Li, Chang Rui Zhang, Bin Li, Feng Cao, Si Qing Wang
• Keywords: Borazine, Boron Nitride, Chemical Vapor Deposition (CVD), Coating

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