Effect of Pressures on the Chemical Vapor Deposition of BN Using Borazine

Abstract:

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Boron nitride coatings have been prepared by chemical vapor deposition using borazine as single precursor at 900 °C. The effect of the total pressure on the surface morphologies of the coatings was investigated. For low total pressures (≤ 3 kPa), the deposits presents a compact pebble-like surface structure. However, when high total pressures (> 3 kPa) were used, the surface of the coatings presents a loose grain-like feature. When the total pressure increases up to 12 kPa, the coatings shows a porous surface structure. The composition and structure of the deposited coatings were investigated by means of FTIR and XRD analysis. It shows that the coatings have a structure of turbostratic boron nitride.

Info:

Periodical:

Edited by:

Zeng Zhu

Pages:

588-592

DOI:

10.4028/www.scientific.net/AMR.214.588

Citation:

J. S. Li et al., "Effect of Pressures on the Chemical Vapor Deposition of BN Using Borazine", Advanced Materials Research, Vol. 214, pp. 588-592, 2011

Online since:

February 2011

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Price:

$35.00

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