Effect of Pressures on the Chemical Vapor Deposition of BN Using Borazine
Boron nitride coatings have been prepared by chemical vapor deposition using borazine as single precursor at 900 °C. The effect of the total pressure on the surface morphologies of the coatings was investigated. For low total pressures (≤ 3 kPa), the deposits presents a compact pebble-like surface structure. However, when high total pressures (> 3 kPa) were used, the surface of the coatings presents a loose grain-like feature. When the total pressure increases up to 12 kPa, the coatings shows a porous surface structure. The composition and structure of the deposited coatings were investigated by means of FTIR and XRD analysis. It shows that the coatings have a structure of turbostratic boron nitride.
J. S. Li et al., "Effect of Pressures on the Chemical Vapor Deposition of BN Using Borazine", Advanced Materials Research, Vol. 214, pp. 588-592, 2011