Interferometer Environmental Error Compensation Based on Refractive Index’s Spatio-Temporal Coupling Model

Abstract:

By analyzing the length measurement principle of interferometer, the key of environmental error compensation of interferometer is modeling the refractive index distribution along the measurement optical path. The spatio-temporal coupling models of temperature, pressure and humidity were established through the collected data by sensors, using the block pulse operator method. Then the model of refractive index over time along the optical path was obtained by Edlén’s formulation, and the environmental error compensation was achieved. The simulation results of lithography mask stage’s movement environmental flow and measurement showed that this method can compensate interferometer environmental error well, and the following residual error was reduced to less than 1nm so that the resolution level was achieved.

• Periodical: Advanced Materials Research (Volumes 219-220)
• Pages: 670-674
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.219-220.670
• Online since: March 2011
• Authors: Zhen Yu Gao, Ming Zhang, Jin Chun Hu, Yu Zhu, Guang Hong Duan
• Keywords: Block Pulse Operator, Environmental Error Compensation, Interferometer

References

[1] SUO Rui, FAN Zhijun, LI Yan, etc, Dual frequency Laser Interferometer Present State and Development[J], LASER & INFRARED, 2004.34（4）：251~253.

[2] GUAN Xinan, YUAN Shuzhong, LIU Yuzhao, Dual frequency laser interferometer[M], China metrology press, (1987).

[3] Norman Bobroff, Recent advances in displacement measuring interferometry[J], Measure Science Technology, 1993.3:907~926.

DOI: 10.1088/0957-0233/4/9/001

[4] QU Jun, ZHANG Guoxiong, Environmental error compensation of interferometer displacement metrology[J], AIRCRAFT ENGINE, 2001，3：43~44.

[5] LI Yanjun, System identification[M], Northwestern Polytechnical University Press: Xi An, (1991).

[6] S.Omatu, J.H. Seifeld. Distributed parameter system: theory and application[M]. Oxford Science Publication. (1989).

[7] WANG Xingyu, JIANG Weisun, Block pulse operator and its application[M], East China Institute of Technology Press, (1987).

[8] Edlen B. The Refractive Index of Air[J]. Metrologia,1966,2:71~80.