A Micro-Machined Ceramic Hot-Plate for Gas Sensor Applications

Abstract:

A novel suspended ceramic hot-plate and wire-free bonding interconnection was investigated. The device was made on the popular alumina ceramic flakes with a platinum heater prepared by lift-off process. The structure of suspended beam was machined by laser micromachining technique. This contribution presents first results for single-layer’s ceramic hot-plates that include design, manufacturing and tests of such devices. The results show that the ceramic hot-plate has lower power consumption (280 mW at 400 °C) than classical ceramic gas sensors. Moreover, it has less expensive manufacturing and bonding process than Si manufacturing technology. Low power consumption and good performance at high working temperature (600 °C or more) makes it possibly to be used in some specific applications for gas sensors.

• Periodical: Advanced Materials Research (Volumes 228-229)
• Pages: 558-562
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.228-229.558
• Online since: April 2011
• Authors: Yan Bing Xue, Zhen An Tang
• Keywords: Ceramic Hot-Plate, Gas Sensor, Heating Power, Laser Micromachining

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