A Micro-Machined Ceramic Hot-Plate for Gas Sensor Applications
A novel suspended ceramic hot-plate and wire-free bonding interconnection was investigated. The device was made on the popular alumina ceramic flakes with a platinum heater prepared by lift-off process. The structure of suspended beam was machined by laser micromachining technique. This contribution presents first results for single-layer’s ceramic hot-plates that include design, manufacturing and tests of such devices. The results show that the ceramic hot-plate has lower power consumption (280 mW at 400 °C) than classical ceramic gas sensors. Moreover, it has less expensive manufacturing and bonding process than Si manufacturing technology. Low power consumption and good performance at high working temperature (600 °C or more) makes it possibly to be used in some specific applications for gas sensors.
Y. B. Xue and Z. A. Tang, "A Micro-Machined Ceramic Hot-Plate for Gas Sensor Applications", Advanced Materials Research, Vols. 228-229, pp. 558-562, 2011