Research on the Preparation Methods of Silicon Oxide Thin Films
Silicon oxide thin films have many excellent properties such as hardness, optical,dielectric properties,wear-resistance and corrosion-resistance. It has been widely used in optical and microelectronic applications. The preparation methods mainly include phsical vapor deposition and chemical vapor deposition.The paper reviews a few preparation methods of silicon oxide thin films, and compares advantages and disadvantages w ith each other. On the other hand,it point out the tendency of development.
Zhong Cao, Lixian Sun, Xueqiang Cao, Yinghe He
C. W. Li et al., "Research on the Preparation Methods of Silicon Oxide Thin Films", Advanced Materials Research, Vols. 233-235, pp. 2556-2560, 2011