The Relationship between the Initial Gas Ratios and the Condensed Phase Composition in the CVD of BxC with BCl3-CH4-H2 Precursors

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For the preparation of the self-healing phase BxC with BCl3-CH4-H2 precursors, the production has been examined as a function of the initial gas ratios of BCl3/(BCl3+CH4) and H2/(BCl3+CH4) at given temperature and pressure. The results show that the composition of the condensed phase is quite sensitive to the molar ratio of BCl3/(BCl3+CH4) and H2/(BCl3+CH4). The ideal condition for the deposition of BxC is that the ratio of BCl3/(BCl3+CH4) is 0.8 and the H2/(BCl3+CH4) ratio ranges from 10 to 105.2. The carbon or boron-rich material is mainly controlled by the ratios of BCl3/(BCl3+CH4) and H2/(BCl3+CH4). The deposition condition of carbon-rich phase should be in low BCl3/(BCl3+CH4) (0.0~0.8) and H2/(BCl3+CH4) (10-2<102) ratios, whereas that of the boron-rich phase needs high BCl3/(BCl3+CH4) (0.8~1.0) and H2/(BCl3+CH4) (104~105) ratios.

Info:

Periodical:

Advanced Materials Research (Volumes 239-242)

Edited by:

Zhong Cao, Xueqiang Cao, Lixian Sun, Yinghe He

Pages:

1761-1765

DOI:

10.4028/www.scientific.net/AMR.239-242.1761

Citation:

J. L. Deng et al., "The Relationship between the Initial Gas Ratios and the Condensed Phase Composition in the CVD of BxC with BCl3-CH4-H2 Precursors", Advanced Materials Research, Vols. 239-242, pp. 1761-1765, 2011

Online since:

May 2011

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$35.00

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