The Relationship between the Initial Gas Ratios and the Condensed Phase Composition in the CVD of B_xC with BCl₃-CH₄-H₂ Precursors

Abstract:

For the preparation of the self-healing phase B_xC with BCl₃-CH₄-H₂ precursors, the production has been examined as a function of the initial gas ratios of BCl₃/(BCl₃+CH₄) and H₂/(BCl₃+CH₄) at given temperature and pressure. The results show that the composition of the condensed phase is quite sensitive to the molar ratio of BCl₃/(BCl₃+CH₄) and H₂/(BCl₃+CH₄). The ideal condition for the deposition of B_xC is that the ratio of BCl₃/(BCl₃+CH₄) is 0.8 and the H₂/(BCl₃+CH₄) ratio ranges from 10 to 10^5.2. The carbon or boron-rich material is mainly controlled by the ratios of BCl₃/(BCl₃+CH₄) and H₂/(BCl₃+CH₄). The deposition condition of carbon-rich phase should be in low BCl₃/(BCl₃+CH₄) (0.0~0.8) and H₂/(BCl₃+CH₄) (10^-2<10²) ratios, whereas that of the boron-rich phase needs high BCl₃/(BCl₃+CH₄) (0.8~1.0) and H₂/(BCl₃+CH₄) (10⁴~10⁵) ratios.

• Periodical: Advanced Materials Research (Volumes 239-242)
• Pages: 1761-1765
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.239-242.1761
• Online since: May 2011
• Authors: Juan Li Deng, Lai Fei Cheng, Li Ning Gao, Ke He Su
• Keywords: Boron Carbide, Condensed Phase, CVD, Deposition Condition, Thermodynamic

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