Simulation Research of the Effect of Thermal Reflow Processing Parameters on the Profile of Micro-Spherical Structure

Abstract:

Article Preview

In this paper reflow process is integrated into LIGA process in order to realize three dimensional fabrication. The melting and deformation process of photoresist, which has an initial cylindrical shape of D500μm and h66μm, and the influence of various processing parameters on the height of formed microlens, is simulated with Marc. The optimum processing parameters combination is obtained by orthogonal experiment method and the influence of different processing parameters on the height of micro-spherical structure is studied with single factor experiment method. The results showed that the optimum processing parameters combination was 1°C /s for heating rate, 110°C for heating temperature and 45min for holding time; the significance of processing parameters on the micro-spherical structure’s height can be ordered in holding time>heating rate>heating temperature.

Info:

Periodical:

Advanced Materials Research (Volumes 239-242)

Edited by:

Zhong Cao, Xueqiang Cao, Lixian Sun, Yinghe He

Pages:

517-523

DOI:

10.4028/www.scientific.net/AMR.239-242.517

Citation:

B. Y. Jiang et al., "Simulation Research of the Effect of Thermal Reflow Processing Parameters on the Profile of Micro-Spherical Structure", Advanced Materials Research, Vols. 239-242, pp. 517-523, 2011

Online since:

May 2011

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.