Manufacturing of Micro Drill with Electrochemical Etching
In this paper, a practical micromachining technology was applied for the fabrication of a micro drill using electrochemical etching process. Sodium chloride solution was used as electrolyte, a tungsten carbide rods can be dissolved to some micrometers from original dimension by electrochemical etching with supersonic agitation. High-aspect-ratio of micro tungsten carbide rod was easily obtained by this process. Processing performance was investigated according to applied voltage, etching time, and electrolyte concentration. A micro drill of diameter 60 μm was processed by proposed supersonic aided electrochemical etching process.
Zhong Cao, Xueqiang Cao, Lixian Sun, Yinghe He
F. T. Weng et al., "Manufacturing of Micro Drill with Electrochemical Etching", Advanced Materials Research, Vols. 239-242, pp. 671-674, 2011