Manufacturing of Micro Drill with Electrochemical Etching

Feng Tsai Weng; Fang Chang Hsu; Kuei Shu Hsu; Chi Ting Ho

doi:10.4028/www.scientific.net/AMR.239-242.671

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 239-242Manufacturing of Micro Drill with Electrochemical...

Manufacturing of Micro Drill with Electrochemical Etching

Abstract:

In this paper, a practical micromachining technology was applied for the fabrication of a micro drill using electrochemical etching process. Sodium chloride solution was used as electrolyte, a tungsten carbide rods can be dissolved to some micrometers from original dimension by electrochemical etching with supersonic agitation. High-aspect-ratio of micro tungsten carbide rod was easily obtained by this process. Processing performance was investigated according to applied voltage, etching time, and electrolyte concentration. A micro drill of diameter 60 μm was processed by proposed supersonic aided electrochemical etching process.

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Periodical:

Advanced Materials Research (Volumes 239-242)

Pages:

671-674

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https://doi.org/10.4028/www.scientific.net/AMR.239-242.671

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Online since:

May 2011

Authors:

Feng Tsai Weng, Fang Chang Hsu, Kuei Shu Hsu, Chi Ting Ho

Keywords:

Electrochemical Etching, Micro-Drill

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