Clamping Accuracy Detection and Display System of Integral Turbine-rotor in Molecular Pump
Molecular pump with magnetic suspension is an important vacuum extractor. The machining accuracy of turbine-rotor has crucial influence on the key parameters of molecular pump, such as pumping speed, compression ratio. A clamping accuracy detection and display system of semi-fished turbine-rotor was established. The maximum coaxiality error and its position could be detected, displayed and recorded easily. With a precision fine tuning device, coaxiality error could be reduced from 30µm to 10µm. This system effectively reduces the turbine-rotor’s centrifugal force, and increases the stability of molecular pump with magnetic suspension.
Zhong Cao, Xueqiang Cao, Lixian Sun, Yinghe He
Y. Zhao et al., "Clamping Accuracy Detection and Display System of Integral Turbine-rotor in Molecular Pump", Advanced Materials Research, Vols. 239-242, pp. 90-93, 2011