Clamping Accuracy Detection and Display System of Integral Turbine-rotor in Molecular Pump

Abstract:

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Molecular pump with magnetic suspension is an important vacuum extractor. The machining accuracy of turbine-rotor has crucial influence on the key parameters of molecular pump, such as pumping speed, compression ratio. A clamping accuracy detection and display system of semi-fished turbine-rotor was established. The maximum coaxiality error and its position could be detected, displayed and recorded easily. With a precision fine tuning device, coaxiality error could be reduced from 30µm to 10µm. This system effectively reduces the turbine-rotor’s centrifugal force, and increases the stability of molecular pump with magnetic suspension.

Info:

Periodical:

Advanced Materials Research (Volumes 239-242)

Edited by:

Zhong Cao, Xueqiang Cao, Lixian Sun, Yinghe He

Pages:

90-93

DOI:

10.4028/www.scientific.net/AMR.239-242.90

Citation:

Y. Zhao et al., "Clamping Accuracy Detection and Display System of Integral Turbine-rotor in Molecular Pump", Advanced Materials Research, Vols. 239-242, pp. 90-93, 2011

Online since:

May 2011

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Price:

$35.00

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