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Clamping Accuracy Detection and Display System of Integral Turbine-rotor in Molecular Pump

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Abstract:

Molecular pump with magnetic suspension is an important vacuum extractor. The machining accuracy of turbine-rotor has crucial influence on the key parameters of molecular pump, such as pumping speed, compression ratio. A clamping accuracy detection and display system of semi-fished turbine-rotor was established. The maximum coaxiality error and its position could be detected, displayed and recorded easily. With a precision fine tuning device, coaxiality error could be reduced from 30µm to 10µm. This system effectively reduces the turbine-rotor’s centrifugal force, and increases the stability of molecular pump with magnetic suspension.

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Advanced Materials, CEAM 2011 View Preview

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Periodical:

Advanced Materials Research (Volumes 239-242)

Pages:

90-93

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.239-242.90

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Online since:

May 2011

Authors:

Yan Zhao, Shi Yu Yang, Hao Ran Liu, Bin Liu, Jing Shao

Keywords:

Dynamic Balancing, Eccentricity, Molecular Pump, Turbine-Rotor

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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