Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish

Abstract:

This paper discusses the fabrication of nanopillars using focused ion beam (FIB) sputtering. A 25 keV Ga+ FIB was used to machine the nanopillars. A reversed bitmap method was used to fabricate nanopillars where it milled the substrate all over except the nanopillar area. The height of the nanopillars ranges from 1 to 5.5 μm with aspect ratio of 1-6. Empirical relationship of taper angle, aspect ratio and height of the nanopillar were established. Taper angle was found to be reduced as the height of the nanopillar increased. The taper angle of nanopillars depends on the acceleration voltage, probe current and dwell time.

• Periodical: Advanced Materials Research (Volumes 264-265)
• Pages: 1352-1356
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.264-265.1352
• Online since: June 2011
• Authors: Yeakub Ali Mohammad, Nurul Hajar
• Keywords: Cell Culture Dish, Focused Ion Beam (FIB), Micro Machining, Nanopillar, Nanopillar Sheet, Nanotechnology

References

[1] R. Yang, C. Mullen, M. Schaline, K. Reithmaier, R. Sheets High Throughput projection UV lithography of high aspect ratio thick SU-8 microstructures, J. Microsyst. Techno. l, Vol. 14 (2008), 1233-1243.

DOI: 10.1007/s00542-007-0520-0

[2] D. Noda, M. Tanaka, K. Shimada, W. Yashiro, A. Momose, T. Hattori, Fabrication of large area diffraction grating using LIGA process, J. Microsyst. Technol., Vol. 14 (2008), 1311-1315.

DOI: 10.1007/s00542-008-0584-5

[3] K.Y. Hung and T.H. Liang, Application of inclined-exposure and thick film process for high aspect ratio microstructures on polymer optic devices, J. Microsyst. Technol., Vol. 14 (2008), 1217-1222.

DOI: 10.1007/s00542-007-0545-4

[4] M.C. Wu, A. Aziz, J.D.S. Witt, M.C. Hickey, M. Ali, C.H. Marrows, B.J. Hickey, M.G. Blamire, Structural and functional analysis of nanopillar spin electronic devices fabricated by 3D focused ion beam lithography, Institute of Physics Publishing, Nanotechnology, Vol. 19 (2008).

DOI: 10.1088/0957-4484/19/48/485305

[5] A. Uranga, F. Ay, J.D.B. Bradley, R.M.D. Ridder, K. Worhoff, M. Pollnau, Focused ion beam nano-structuring of photonic Bragg gratings in Al2O3 waveguides, Proc. Symposium IEEE/LEOS Benelux Chapter, Brussels, (2007), 247-250.

DOI: 10.1364/cleo.2010.cmq4

[6] J. Lian, The focused-ion-beam microscope-More than a precision milling, JOM: Overview of Elctron Microscopy, (2006), 27-31.

DOI: 10.1007/s11837-006-0156-z

[7] W. Zhou, H. Qian, L. Wang, Maskless fabrication of highly-ordered periodic nanopillars using FIB and bitmap control, J. of Microsc. Microanal, Vol. 2 (2005), 822-823.

DOI: 10.1017/s1431927605508924

[8] S.U. Son, Y.H. Choi, S.S. Lee, An efficient cell count method using a lattice molded on indents of a culture dish, J. of Sensors and Actuators A: Physical, Vol. 147 (2008), 665-671.

DOI: 10.1016/j.sna.2008.04.003

[9] P. Kim, D.H. Kim, B. Kim, S.K. Choi, S.H. Lee, A. Khademhossein, R. Langer, K.Y. Suh, Fabrication of nanostructures of polyethylene glycol for applications to protein adsorption and cell adhesion, Institute of Physics Publishing, Nanotechnology, Vol. 16 (2005).

DOI: 10.1088/0957-4484/16/10/072

[10] S. Nomura, H. Kojima, Y. Obyabu, K. Kuwahara, A. Miyauchi, T. Uemura, Nanopillar sheets as a new type of cell culture dish: detailed study of HeLa cells cultures on nanopillar sheet, J. Artif. Organs, Vol. 9 (2006), 90-96.

DOI: 10.1007/s10047-006-0329-0