Research on Output Power of Plasma for PCVD Synthesizing Silica Glass

Yu Fen Wang; Xue Fu Song; Yuan Cheng Sun

doi:10.4028/www.scientific.net/AMR.291-294.3009

Paper Titles

Comparison of Forecasting Methods for Thermal Error on High-Speed Motorized Spindle
p.2991

Proposal for Machining Optical Free Form Surfaces Using Atmospheric Pressure Plasma Jet
p.2995

Study on Machining and Measurement for Borosilicate Glass Conical Ellipsoid
p.2999

Synchronous Control of Multi-Integrated System of Electro-Hydraulic with Mechanic Based on Virtual Axis Model
p.3003

Research on Output Power of Plasma for PCVD Synthesizing Silica Glass
p.3009

Investigation of Dry Cutting and Applications of Cutting Fluid in Ball-End Milling Process
p.3013

Development of Recycled TiH₂ Feedstock for Powder Injection Molding
p.3024

In-Mold Rheology Curves with Feedstock and Mold Dimension
p.3028

Manufacturing Technology of μ-Gear and Mold by Fe-Ni Alloy Electroforming
p.3032

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 291-294Research on Output Power of Plasma for PCVD...

Research on Output Power of Plasma for PCVD Synthesizing Silica Glass

Abstract:

Super purity silica glass was synthesized by Plasma Chemical Vapor Deposition (PCVD) method, during which inductively coupled plasma was used as the heat source. Influence of structure factor of tube and working gas on output power were discussed. The structure factor of tube was confirmed by analyzing the relation between structure factor of tube and coupling efficiency. With the increase of coupling efficiency, output power and plasma radius grow bigger. Super purity silica glass can be successfully synthesized when air was used working gas, during which input power was 100kW and output power reached to 40kW.

You might also be interested in these eBooks

Materials Processing Technology, AEMT2011

View Preview

Info:

Periodical:

Advanced Materials Research (Volumes 291-294)

Pages:

3009-3012

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.291-294.3009

Citation:

Cite this paper

Online since:

July 2011

Authors:

Yu Fen Wang, Xue Fu Song, Yuan Cheng Sun

Keywords:

Output Power, PCVD, Structure Factor of Tube, Super Purity Silica Glass, Working Gas

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] X.F. Song, Y.C. Sun, H. Zhong, Z.A. Gu: Synthesis of Silica Glass by Plasma Chemical Vapor Deposition Method. Journal of the Chinese ceramic society. 2008,36(4):531-534.

Google Scholar

[2] Y.F. Wang, H. Zhong, X.F. Song, C.D. Rao, X.B. Song, Z.A. Gu: A Method of Vapor Synthesizing Silica Glass with High Frequency Plasma. CN Patent, 1699232, 2005.

Google Scholar

[3] Mensing, A.E. and Boedeker, L.R:Theoretical investigations of R.F. induction heated plasmas. NASA. 1969:l3l2.

Google Scholar