Research on Output Power of Plasma for PCVD Synthesizing Silica Glass

Abstract:

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Super purity silica glass was synthesized by Plasma Chemical Vapor Deposition (PCVD) method, during which inductively coupled plasma was used as the heat source. Influence of structure factor of tube and working gas on output power were discussed. The structure factor of tube was confirmed by analyzing the relation between structure factor of tube and coupling efficiency. With the increase of coupling efficiency, output power and plasma radius grow bigger. Super purity silica glass can be successfully synthesized when air was used working gas, during which input power was 100kW and output power reached to 40kW.

Info:

Periodical:

Advanced Materials Research (Volumes 291-294)

Edited by:

Yungang Li, Pengcheng Wang, Liqun Ai, Xiaoming Sang and Jinglong Bu

Pages:

3009-3012

DOI:

10.4028/www.scientific.net/AMR.291-294.3009

Citation:

Y. F. Wang et al., "Research on Output Power of Plasma for PCVD Synthesizing Silica Glass", Advanced Materials Research, Vols. 291-294, pp. 3009-3012, 2011

Online since:

July 2011

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Price:

$35.00

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