Proposal for Machining Optical Free Form Surfaces Using Atmospheric Pressure Plasma Jet

Abstract:

Optics with free form surface can be achieve special imaging effects and reduce component amounts in optical systems. However, it is difficulty to fabricate high accuracy, damage-free optical surface with free form surfaces by conventional method. Atmospheric plasma machining is a non-contact chemical processing method which can fabricate optics without damaged layer. Numerical controlled atmospheric pressure plasma machining (NC-APPM) method is proposed to machine optical free form surfaces. A new atmospheric pressure plasma jet generator was designed to get Gaussian rotational symmetry removal spot and the spot maximum diameter is 1.5mm. Base on dwelling time algorithm, a sinusoidal wave structure, the pitch 2mm and the amplitude 500 nm, is fabricated on a pre-polished flat silica quartz surface using three-axis numerically controlled machine made by ourselves. The result shows that the amplitude error is 59 nm compare to the expectation value surfaces using numerical controlled atmospheric plasma machining method.

• Periodical: Advanced Materials Research (Volumes 291-294)
• Pages: 2995-2998
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.291-294.2995
• Online since: July 2011
• Authors: Yan Fu Zhang, Bo Wang, Shen Dong
• Keywords: Atmospheric Pressure Plasma Machining, Optical Free Form Surfaces, Plasma Jet Generator, Sinusoidal Net Structure

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