This paper presents a new method to fabricate tungsten microelectrode in a single pulse electrical discharge. The electrode material, diameter and polarity affect the shape of probe. The 80μm diameter tungsten wire between 500 and 600μF capacitance can be fabricated in 1μm tungsten electrode probe tip. The experiment use different material such as W, Cu and Mo. Finally, in the condition of “negative pole machining”, only tungsten can be used to make probe. It can greatly shorten the microelectrode fabrication time and effectively improve the reliability of the microelectrode and can fabricate a nanometer level tip in general electrical discharge machining (EDM) machine tool not add any other apparatus. The fabricated microelectrode can be used as a probe for scanner and measurement devices.