Design, Fabrication and Analysis of Microrobotic Insect Wings and Thorax with Different Materials by MEMS Technology

Peng Cheng Chi; Wei Ping Zhang; Wen Yuan Chen; Hong Yi Li; Kun Meng

doi:10.4028/www.scientific.net/AMR.291-294.3135

Paper Titles

Optimization of Deformation Shape of an Active Electro-Optical Focusing Device
p.3116

Channel Direction Effect on the GaAs Mesfet Performances for MEMS Accelerometer Application
p.3121

Simulation of Miniature Vapor Compression Heat Pump System
p.3126

Performance of Surface Carrier Mobility for Nano-Node Strained (110) MOSFETs with Temperature Effect
p.3131

Design, Fabrication and Analysis of Microrobotic Insect Wings and Thorax with Different Materials by MEMS Technology
p.3135

The Theory Based on the Displacement of Mass of MEMS Gyroscope Used in Spinning Projectiles Analysis and Simulation
p.3139

Clothing Workshop Production Line Analysis and Improvement Research Based on IE
p.3147

Modeling and Exergy Analysis of Seawater Source Heat Pump System
p.3152

Dynamic Analysis of Physical Modeling of Underground Gas Storage
p.3157

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 291-294Design, Fabrication and Analysis of Microrobotic...

Design, Fabrication and Analysis of Microrobotic Insect Wings and Thorax with Different Materials by MEMS Technology

Abstract:

This paper presents a feasibility step in the development of biomimetic microrobotic insects. Advanced engineering technologies available for applications such as the micro-electro-mechanical system (MEMS) technologies are used. A flapping-wing flying MEMS concept and design inspired from insects is first described. Then different kinds of materials used feasibly for flapping-wing microrobotic insect by MEMS technology, such as SU-8, Titanium alloy and Parylene-C, are discussed. And artificial insect wings and thoraxs with different materials by MEMS Technology are fabricated and analyzed. Finally, summarize the paper and propose future research priorities.

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Periodical:

Advanced Materials Research (Volumes 291-294)

Pages:

3135-3138

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.291-294.3135

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Online since:

July 2011

Authors:

Peng Cheng Chi, Wei Ping Zhang, Wen Yuan Chen, Hong Yi Li, Kun Meng

Keywords:

Mechanical, MEMS Technology, Microrobot

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