Design, Fabrication and Analysis of Microrobotic Insect Wings and Thorax with Different Materials by MEMS Technology
This paper presents a feasibility step in the development of biomimetic microrobotic insects. Advanced engineering technologies available for applications such as the micro-electro-mechanical system (MEMS) technologies are used. A flapping-wing flying MEMS concept and design inspired from insects is first described. Then different kinds of materials used feasibly for flapping-wing microrobotic insect by MEMS technology, such as SU-8, Titanium alloy and Parylene-C, are discussed. And artificial insect wings and thoraxs with different materials by MEMS Technology are fabricated and analyzed. Finally, summarize the paper and propose future research priorities.
Yungang Li, Pengcheng Wang, Liqun Ai, Xiaoming Sang and Jinglong Bu
P. C. Chi et al., "Design, Fabrication and Analysis of Microrobotic Insect Wings and Thorax with Different Materials by MEMS Technology", Advanced Materials Research, Vols. 291-294, pp. 3135-3138, 2011