Design, Fabrication and Analysis of Microrobotic Insect Wings and Thorax with Different Materials by MEMS Technology

Abstract:

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This paper presents a feasibility step in the development of biomimetic microrobotic insects. Advanced engineering technologies available for applications such as the micro-electro-mechanical system (MEMS) technologies are used. A flapping-wing flying MEMS concept and design inspired from insects is first described. Then different kinds of materials used feasibly for flapping-wing microrobotic insect by MEMS technology, such as SU-8, Titanium alloy and Parylene-C, are discussed. And artificial insect wings and thoraxs with different materials by MEMS Technology are fabricated and analyzed. Finally, summarize the paper and propose future research priorities.

Info:

Periodical:

Advanced Materials Research (Volumes 291-294)

Edited by:

Yungang Li, Pengcheng Wang, Liqun Ai, Xiaoming Sang and Jinglong Bu

Pages:

3135-3138

DOI:

10.4028/www.scientific.net/AMR.291-294.3135

Citation:

P. C. Chi et al., "Design, Fabrication and Analysis of Microrobotic Insect Wings and Thorax with Different Materials by MEMS Technology", Advanced Materials Research, Vols. 291-294, pp. 3135-3138, 2011

Online since:

July 2011

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Price:

$35.00

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