Growth and Application of High Quality ZnO Films Grown on Diamond Substrates

Ke Tang; Lin Jun Wang; Jian Huang; Ji Jun Zhang; Wei Min Shi; Yi Ben Xia

doi:10.4028/www.scientific.net/AMR.295-297.2011

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 295-297Growth and Application of High Quality ZnO Films...

Growth and Application of High Quality ZnO Films Grown on Diamond Substrates

Abstract:

Highly c-axis oriented ZnO films were grown on the nucleation sides of freestanding diamond (FSD) substrates with homobuffer layer by radio-frequency (RF) magnetron sputtering method. The effect of oxygen partial pressure (O₂/Ar) on the properties of ZnO films was studied. ZnO-based UV photoconductive detector with planar interdigital (IDT) electrodes was fabricated by the lift off technique. Current-voltage (I-V) characteristics of the detector under ultraviolet (UV) light were measured and discussed.

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Advanced Materials Research (Volumes 295-297)

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2011-2014

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https://doi.org/10.4028/www.scientific.net/AMR.295-297.2011

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July 2011

Authors:

Ke Tang, Lin Jun Wang, Jian Huang, Ji Jun Zhang, Wei Min Shi, Yi Ben Xia

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Detector, Freestanding Diamond, UV, Zinc Oxide (ZnO)

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