Growth and Application of High Quality ZnO Films Grown on Diamond Substrates
Highly c-axis oriented ZnO films were grown on the nucleation sides of freestanding diamond (FSD) substrates with homobuffer layer by radio-frequency (RF) magnetron sputtering method. The effect of oxygen partial pressure (O2/Ar) on the properties of ZnO films was studied. ZnO-based UV photoconductive detector with planar interdigital (IDT) electrodes was fabricated by the lift off technique. Current-voltage (I-V) characteristics of the detector under ultraviolet (UV) light were measured and discussed.
Pengcheng Wang, Liqun Ai, Yungang Li, Xiaoming Sang and Jinglong Bu
K. Tang et al., "Growth and Application of High Quality ZnO Films Grown on Diamond Substrates", Advanced Materials Research, Vols. 295-297, pp. 2011-2014, 2011