Analysis of Aromatic Volatiles Utilizing a MEMS-Based Gas Chromatography Column

Abstract:

The purpose of this study is to propose and apply a MEMS-based gas chromatography (GC) device comprising a miniature serpentine column. A 2 m long, 200 μm wide and 250 μm deep column was fabricated using a wet etching process and bonded to a Pyrex cover plate. After the GC column was coated with Carbowax 20M as the stationary phase, the concentrations of benzene, toluene, Ethylbenzene and m-Xylene were successfully detected in the mixed sample. The leakage test and mixed gas separation test achieved a useful separation result for Ethylbenzene-Xylene and Benzene-Toluen mixture at a 17.1 cm/s linear flow rate in a GC chip column.

• Periodical: Advanced Materials Research (Volumes 295-297)
• Pages: 2642-2646
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.295-297.2642
• Online since: July 2011
• Authors: Yu Hao Su, Chia Yen Lee, Ruey Jen Yang
• Keywords: Column, Elution, Gas Chromatography (GC), Micro-Electromechanical System (MEMS), Wet Etching

References

[1] R.R. Reston and E.S. Kolesar,Jr. (1994) Silicon-micromachined gas chromatography system used to separate and detect ammonia and nitrogen dioxide. Part I. Design, fabrication, and integration of the gas chromatography system. J Microelectromech Syst 3(4):134–146

DOI: 10.1109/84.338634

[2] M.J.E. Golay and D.H. Desty (1958) In gas chromatography 1958 (Amsterdam Symposium). Academic Press, New York

[3] S.C. Terry, J.H. Jerman and J.B. Angell (1979) A gas chromatographic air analyzer fabricated on a silicon wafer. IEEE Trans Electron Dev ED-26:1880–1886

DOI: 10.1109/t-ed.1979.19791

[4] E.B. Overton, H.P. Dharmasena, U. Ehrmann, K.Y. Carney (1996) Trends and advance in portable analytical instrumentation. Field Anal. Chem. Technol.:87-92

DOI: 10.1002/(sici)1520-6521(1996)1:2<87::aid-fact4>3.0.co;2-b

[5] B.A. Eckenrode (1998) The application of an integrated multifunctional field-portable GC/MS system. Field Anal. Chem. Technol.:3-20

DOI: 10.1002/(sici)1520-6521(1998)2:1<3::aid-fact2>3.0.co;2-z

[6] A. Bhushan, D. Yemane, D. Trudell, E.B. Overton and J. Goettert (2007) Fabrication of micro-gas chromagraph columns for fast chromatography. Misrosystem. Technol. 13:361-368

DOI: 10.1007/s00542-006-0210-3

[7] S. Zampolli, I. Elmi, J. Stürmann, S. Nicoletti, L. Dori and G.C. Cardinali (2005) Selectivity enhancement of metal oxide gas sensors using a micromachined gas chromatographic column. Sensors and Actuators B 105:400-406

DOI: 10.1016/j.snb.2004.06.036

[8] W.C. Tian, H.K.L. Chan, C.J. Lu, S.W. Pang and E.T. Zellers (2005) Multiple-stage microfabricated preconcentrator-focuser for micro gas chromatography system. Journal of Microelectromechanical System 14(3):498-507

DOI: 10.1109/jmems.2005.844842

[9] M. Agah, J.A. Potkay, G. Lambertus, T. Sacks and K.D. Wise (2005) High-performance temperature-programmed microfabricated gas chromatography columns. Journal of Microelectromechanical System 14(5):1039-1050

DOI: 10.1109/jmems.2005.856648

[10] J.B. Sanchez, F. Berger, M. Fromm and M.H. Nadal (2006) A selective gas detection micro-device for monitoring the volatile organic compounds pollution. Sensors and Actuators B 119:227-233

DOI: 10.1016/j.snb.2005.12.028

[11] M.A. Zareian-Jahromi, M. Ashraf-Khorassani, L.T. Taylor and M. Agah (2000) Design, modeling, and fabrication of MEMS-based multicapillary gas chromatographic columns. Journal of Microelectromechanical System 18(1):28-37

DOI: 10.1109/jmems.2008.2007267

[12] J.J. Van Deemter, F.J. Zuiderweg and A. Klinkenberg (1956) Chem. Eng. Sci. 5:271-289

[13] J.V. Hinshaw and L.S. Ettrt (1994) Introduction to open-tubular column gas chromatography. Advanstar Communications, Cleveland

[14] G.E. Spangler (2001) Relationships for modeling the performance of rectangular gas chromatographic columns. J. Microcolumn Separation 13(7):285-292

DOI: 10.1002/mcs.10008