Preparation and Characteristics of Nanocrystalline Diamond Film by Using of MPVCD

Bao Hua Yang; Hua Li Ma; Hong Yan Lu; Xiao Bo Zhang

doi:10.4028/www.scientific.net/AMR.304.1

Paper Titles

Preface, Organizing Committee

Preparation and Characteristics of Nanocrystalline Diamond Film by Using of MPVCD
p.1

Mechanical and Friction-Wear Properties of MoS₂ Al-Matrix Self-Lubricating
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Shear Stress Analysis of Long-Span Steel Bridge Deck Asphalt Pavement Using FEM
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Prediction of Resilient Modulus for Hot Mix Asphalt Based on Artificial Neural Network
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Application of Improved BP Neural Network Model in Uplift Pressure Monitoring
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Selective Catalytic Reduction of Nitric Oxide with Fe-Mn-Ce Metal Oxide-Based Catalysts
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Research on Parameter Simulation of Pulse Discharge Current in Permanent Magnet Motor Magnetization
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Experiment and Simulation of Eddy-Current Loss inside Copper Shielding of Transformers under DC Biasing Condition
p.41

HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 304Preparation and Characteristics of Nanocrystalline...

Preparation and Characteristics of Nanocrystalline Diamond Film by Using of MPVCD

Abstract:

With the microwave plasma chemical vapor deposition (MPCVD), the effects of the deposition pressure and the different substrate temperature on diamond coating on single crystal silicon substrate were studied systemically. The sample was characterized by means of scanning electron microscopy (SEM) and laser Raman spectra (Raman). The experimental results showed that the surface of the film was compact, the mean particle diameter was 98nm, and that it contains the sp³ carbon phase with good quality.

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Periodical:

Advanced Materials Research (Volume 304)

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1-5

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.304.1

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Online since:

July 2011

Authors:

Bao Hua Yang, Hua Li Ma, Hong Yan Lu, Xiao Bo Zhang

Keywords:

Diamond Film, Microwave Plasma, Raman Spectroscopy

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