Electromechanical Coupling Coefficient of SAW on Proton-Exchanged and Annealed LiNbO3 Waveguides

Chien Chuan Cheng; Re Ching Lin; Wei Tsai Chang; Ying Chung Chen; Kuo Sheng Kao; Chung Jen Chung

doi:10.4028/www.scientific.net/AMR.311-313.1957

Paper Titles

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Electromechanical Coupling Coefficient of SAW on Proton-Exchanged and Annealed LiNbO₃ Waveguides
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Electromechanical Coupling Coefficient of SAW on Proton-Exchanged and Annealed LiNbO₃ Waveguides

Abstract:

We had investigated the electromechanical coupling coefficient (K²) of surface acoustic wave (SAW) on proton-exchanged (PE) and annealed PE (APE) z-cut LiNbO₃ waveguides using octanoic acid. The penetration depth of hydrogen assumed to be equal to the waveguide depth (d) was measured by secondary-ion mass spectrometry (SIMS). The frequency response of SAW was measured with a network analyzer. The annealing process was carried out in a horizontal furnace kept at 400°C for 2 h under a dry O₂ gas flow. The change of K² in PE and APE samples fabricated under different conditions was dependent on kd, where k was the wavenumber. The experimental results showed that the variation of K² in PE samples was significantly decreased with the increase of kd. The reduction of K² may be due to the reduced piezoelectric coefficients in the PE layer. On the other hand, the variation of K² in APE samples also exhibited the decreased tendency after annealing. It indicated that the annealing process could not restore the reduction of K² caused by the PE process.