Spring Force Compensation for Bond Head
A bond head with spring bearing has steady-state error problem in position loop control. To maintain high speed and high precision control, a spring force compensator is proposed in this paper. Firstly, the system is modeled and the problem is stated. Then, a close loop identification method for the spring force is advised. The compensator is also modeled and compared with the traditional controller. In the experiment part, the result shows the new control system with spring force compensator works well.
L. Zhou et al., "Spring Force Compensation for Bond Head", Advanced Materials Research, Vols. 317-319, pp. 1711-1716, 2011