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Spring Force Compensation for Bond Head
Abstract:
A bond head with spring bearing has steady-state error problem in position loop control. To maintain high speed and high precision control, a spring force compensator is proposed in this paper. Firstly, the system is modeled and the problem is stated. Then, a close loop identification method for the spring force is advised. The compensator is also modeled and compared with the traditional controller. In the experiment part, the result shows the new control system with spring force compensator works well.
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1711-1716
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Online since:
August 2011
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© 2011 Trans Tech Publications Ltd. All Rights Reserved
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