Research on the Chemical-Mechanical Grinding (CMG) Tools for Al₂O₃Ceramic

Abstract:

Aiming at the severe surface/subsurface damage of Al₂O₃ceramic ground by diamond grinding wheel, the chemical-mechanical grinding (CMG) tools were studied in this paper. According to the principle of CMG, three types of CMG tools with different abrasives were developed. The chemical compositions of the grinding tools were selected and optimized considering the physicochemical characteristics of Al₂O₃ceramic. By comparing the surface roughness and material removal rate (MRR) of Al₂O₃ceramic respectively ground with SiO₂ , Fe₂O₃ and MgO grinding tools, the grinding performance of those grinding tools were evaluated. The experiment results showed that the grinding performance of SiO₂ grinding tool was the best. The surface roughness and MRR versus SiO₂ grinding tool were all better than other grinding tools, and can reach 28 nm and 15 μm/h respectively. The grinding performance of Fe₂O₃ grinding tool was the worst.

• Periodical: Advanced Materials Research (Volume 325)
• Pages: 270-275
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.325.270
• Online since: August 2011
• Authors: Heng Zhen Dai, Zhu Ji Jin, Shang Gao, Z.C. Tao
• Keywords: Al₂O₃ Ceramic, Chemical-Mechanical Grinding, Grinding Tool, SiO₂ Abrasive

References

[1] B. Zhang, X.L. Zheng, H. Tokura, M. Yoshikawa: Journal of Materials Processing Technology Vol. 132 (2003), p.353.

[2] F. Klocke, R. Zunke: CIRP Annals - Manufacturing Technology Vol. 58 (2009), p.491.

[3] L.B. Zhou, J. Shimizu and H. Eda: International Journal of Manufacturing Technology and Management Vol. 7 (2005), p.441.

[4] L. Zhou, H. EDA, J. Shimizu, S. Kamiya, etc: CIRP Annals- Manufacturing Technology Vol. 55 (2006), p.313.

[5] Nobuo Yasunaga: Journal of the Surface Science Society of Japan Vol. 22 (2001), p.187.

[6] N. Yasunuga: Journal of Japan Society for Precision Engineering Vol. 44 (1978), p.65.

[7] Y. Namba, H. Tsuwa: CIRP Annals - Manufacturing Technology Vol. 26 (1977), p.325.