Tribological Applications Considering Roughness Effects on Grain Flow
The grain flow lubrication, based on Haff's grain flow theory and the Patir/Cheng flow factors method, is applied in the simulations of rough slider bearings and chemical mechanical polishing. In this paper, the results of flow factor, the performance of rough slider bearings and the mechanism of the CMP process for grain flow are briefly demonstrated. An improved CMP model, considering the partial hydrodynamic grain flow lubrication and elastic-plastic microcontact theory, is also proposed. The contact area ratio and the elastoplastic contact area ratio are presented to improve the understanding of CMP mechanisms.
Liangchi Zhang, Chunliang Zhang and Zichen Chen
H. J. Tsai et al., "Tribological Applications Considering Roughness Effects on Grain Flow", Advanced Materials Research, Vols. 328-330, pp. 837-842, 2011