In this paper, scanning electron moiré method is used to measure the mechanical behavior of Ferro-based shape memory alloys(SMA). The moiré patterns are formed by the interference between a 1000 lines/mm cross-type specimen grating (which is fabricated using electron beam lithography) and the scanning lines of Scanning Electron Microscope (SEM). When the specimen is subjected to uniform tension load at the room temperature, the unloading residual strain values in the different regions under the same tensile load and the values in the same region under different tensile loads are compared respectively. The shape memory effect is also studied. From the experimental results, it can be concluded that the proposed moiré method is highly accurate to measure the mechanical behavior of microscopic field.