Technology on Fabrication of Precise SiC Aspherical Mirror

Zhong Yu Zhang

doi:10.4028/www.scientific.net/AMR.337.396

Paper Titles

Characteristics of Electrode Displacement and Force in Resistance Spot Welding
p.379

Structure and Optical Properties of Mg_0.5Zn_0.5O Films
p.383

Influence of Cutting Conditions on the Cutting Performance of TiAl6V4
p.387

The Joining of Oxide Ceramics with Quartz Fiber by Interlayer
p.392

Technology on Fabrication of Precise SiC Aspherical Mirror
p.396

Interfacial Reaction and Solderability of Zn20SnxCu Solder
p.402

Study on Thermoplastic Materials and Absorbing Agent in Laser Transmission Welding
p.406

Numerical Simulation of Ti-6Ai-4V Channel Part in Hot Forming Process
p.410

Influence of Ultra-Fast Cooling Technology on Microstructure and Mechanical Properties of Ti-Microalloyed Steel
p.414

HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 337Technology on Fabrication of Precise SiC...

Technology on Fabrication of Precise SiC Aspherical Mirror

Abstract:

This paper represents a technique to produce the large size optical aspherical mirror by using reaction-bonded silicon carbide to meet the material requirements of the space used mirrors, based on the characters comparison of all types mirror material. Techniques are described in this paper, including the bonding procedure of silicon carbide to form a mirror shape, the CCOM technology for aspheric grinding, polishing on a home-developed tool –FSGJ-2, and the aspheric profilometry. A specialized Offner Null lens is also developed to measure the aspherical mirror with laser interferometer. With the technology depicted in the paper, a 502mm x 298 mm off-axis SiC aspherical mirror is successfully made with a surface accuracy better than 1/50λrms, the final result meets the design requirement.

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Materials Processing Technology, ICMPMT2011

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Periodical:

Advanced Materials Research (Volume 337)

Pages:

396-401

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.337.396

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Online since:

September 2011

Authors:

Zhong Yu Zhang

Keywords:

Aspheric, CCOM Technology, Null Lens Metrology, Profilometry, Reaction-Bonded Silicon Carbide

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