A Study on the Polishing Mechanism of Silicon Carbide (SiC) Optic Surface
This paper studies the polishing mechanism of SiC optic surface; it also introduces the grinding mechanism of ceramic material – indentation fracture model. In this paper, the model of SiC polishing in ideal condition is analyzed and the mechanism of SiC polishing in real state is studied.
Prasad Yarlagadda, Yun-Hae Kim, Zhijiu Ai and Xiaodong Zhang
D. Fan "A Study on the Polishing Mechanism of Silicon Carbide (SiC) Optic Surface", Advanced Materials Research, Vol. 337, pp. 474-478, 2011