A Study on the Polishing Mechanism of Silicon Carbide (SiC) Optic Surface

Di Fan

doi:10.4028/www.scientific.net/AMR.337.474

Paper Titles

Anti-Extrusion Process in the Performance of Different Parameters on the Analysis of Metals
p.456

The Effect of Single Pulse, Double Pulse and ForceArc MIG Welding Technology on Mechanical Properties of Welding Joint for 5083 Aluminum Alloy Used in High-Speed Train Body
p.460

Experimental Study on the Influence of Nozzle Diameter on Abrasive Jet Cutting Performance
p.466

Novel Method to Strengthening of Polymer by Plane Compression Processing
p.470

A Study on the Polishing Mechanism of Silicon Carbide (SiC) Optic Surface
p.474

Deflection Analysis of the Thin-Web Workpiece Structure Using Similarity Concept
p.479

Development of In-Process Chip Breaking Detection by Using Cutting Force and Temperature Signals
p.489

The Properties Research of Hafnium Plate for Control Rod
p.494

Design of Plastic Injection Mold for the Crisper Cover
p.498

HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 337A Study on the Polishing Mechanism of Silicon...

A Study on the Polishing Mechanism of Silicon Carbide (SiC) Optic Surface

Abstract:

This paper studies the polishing mechanism of SiC optic surface; it also introduces the grinding mechanism of ceramic material – indentation fracture model. In this paper, the model of SiC polishing in ideal condition is analyzed and the mechanism of SiC polishing in real state is studied.

You might also be interested in these eBooks

Materials Processing Technology, ICMPMT2011

View Preview

Info:

Periodical:

Advanced Materials Research (Volume 337)

Pages:

474-478

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.337.474

Citation:

Cite this paper

Online since:

September 2011

Authors:

Di Fan

Keywords:

Indentation Fracture Model, Polishing Mechanism, Silicon Carbide (SiC)

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] Q.D. Wang : Large off-axis aspheric manufacturing technology,PhD thesis2001.4

Google Scholar

[2] M. J. Cumbo, D. Fairhurst, S. D. Jacobs, B. E. Puchebner: Slurry particle size evolution during the polishing of optical glass, Applied Optics, Vol.34, No.19, 3743-3755

DOI: 10.1364/ao.34.003743

Google Scholar

[3] J.H. Dai Z.M.Ge:.Introduction to inorganic non-metallic materials .edited by Harbin Institute of Technology Press,Harbin China (1999)

Google Scholar

[4] J. L.Wang, Research on Optical SiC Mirror, postdoctoral reseach report，2002.6

Google Scholar

[5] S. Malkin, T. W. Hwang, Grinding mechanisms for ceramics, Annals of CIRP, 1996, Vol45(2), 569-580

DOI: 10.1016/s0007-8506(07)60511-3

Google Scholar

[6] H. H. Xu, S. Jahanmir, material removal and damage formation in grinding silicon nitride, J. Mater. Res, 1996, Vol.11, 1717-1724

DOI: 10.1557/jmr.1996.0215

Google Scholar

[7] Z.H. Deng，B.Zhang Z.Y. Sun，Material removal mechanism of ceramics grinding，Diamond & Abrasives Engineering，2002，2（128），47-51

Google Scholar

[8] Z.X. Liu，Mechanism of ceramic grinding，Ceramics & Grinding，1998（1），36-42

Google Scholar

[9] D.Fan Z.Y. Zhang H.Y. Niu, Optical surfacing on RB-SiC spherical mirror，Optical Technigue，2004，30（1），6-8

Google Scholar

[10] D.Fan Z.X. Zhang Z.Y. Zhang，Optical surfacing on RB-SiC flat mirror，Optical Technique，2003，29（6），667-668

Google Scholar

[11] D.Fan Z.Y. Zhang H.Y. Niu, Optical surfacing on SiC mirror，Journal of Chinese Ceramic Society，2003，31（11），1096-1100

Google Scholar

[12] Lisa Rich, David A. Crowe, Polishing process for concave lightweight silicon-coated siliconcarbide optics, SPIE Proceeding Vol.2543, 236-247

Google Scholar

[13] M.A. Ealey, J.A. Wellman, Polishability of CERAFORM silicon carbide, SPIE 1996 Inter. Symposium on Silicon Carbinde Materials for Optics and Precision Structure, Denver, Colorado, USA.

DOI: 10.1117/12.258290

Google Scholar