LonWorks Node Communicating on Twisted Pairs Based on Virtual Toke
p.76
p.76
An Angle Measuring System for Knife Blade Based on Laser and Electronic Clinometer
p.80
p.80
Design of an Innovative High-Torque Brake
p.84
p.84
Calculation Method of Intumescent Coatings of Fire Protection for Concrete-Filled Hollow Structural Steel Columns
p.88
p.88
Optimization of Poly-Silicon Deposition Process for Semiconductor Bridge
p.92
p.92
Inhibitive Performance of 1,4/1,6-Bis(α-Alkyl Pyridinium ) Butane/Hexane Dibromide on A3 Steel
p.96
p.96
Study on Rotor’s Tooth Profiles of Double Enveloping Cycloid Pump
p.105
p.105
Research of the Pilot Operated Relief Valve for MRF System
p.113
p.113
Enhancement of Fluid Mixing in a Double T-Shaped Micromixer by Periodic Disturbances of Pressure
p.118
p.118
Optimization of Poly-Silicon Deposition Process for Semiconductor Bridge
Abstract:
Aiming at the severe effect of poly-silicon deposition process on the performance of semiconductor bridge, experiments were made on optimization of poly-silicon deposition to obtain optimal process conditions. Resistance of the poly-silicon semiconductor bridge was stabilized 1±0.07Ω, satisfying its application requirements.
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Periodical:
Advanced Materials Research (Volume 339)
Pages:
92-95
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Online since:
September 2011
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© 2011 Trans Tech Publications Ltd. All Rights Reserved
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