Precision Calculation Algorithm and Error Analysis of Zoom Magnification Measurement
The high precise measurement for magnification of optical system of microscope has been demonstrated by using special barcode design and precise barcode image processing technologies. The magnification measurement with 50ppm accuracy is obtained. According to the measurement error estimation, the accuracy for system magnification device is about 0.06%. Barcode position is possible to reach 0.5μm for low magnification and 0.1μm for high magnification.
Z. D. Zeng et al., "Precision Calculation Algorithm and Error Analysis of Zoom Magnification Measurement", Advanced Materials Research, Vol. 346, pp. 828-834, 2012